The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.  This purchase, which is part of CHIPS R&D work within the Microsystems and Nanotechnology Division within the Physical Measurement Laboratory is needed as part of our research on atomic layer deposition we will utilize a singly-resonant, continuous wave optical parametric oscillator. The Microsystems and Nanotechnology Division advances nanofabrication technologies and uses them to develop innovative integrated measurement microsystems.

            This optical parametric oscillator allows for the spectral translation of near-infrared laser light into the mid-infrared spectral region. The mid-infrared region contains strong absorption features of a wide variety of atomic and molecular species of interest to the chemistry and physics communities. A singly-resonant, continuous wave optical parametric oscillator is well suited for this type of spectroscopy due to its wide tunability, high optical power, narrow linewidth, and the ability to translate modulation with high fidelity. This OPO will provide mid-infrared light which is tunable throughout much of the mid-infrared spectral region (2.3 micron to 4 micron) for interrogating molecules in process gases. This will allow us to interrogate a range of molecular gases in order to assess process conditions.

            In order to seed the amplifier which pumps the optical parametric oscillator we require an external cavity diode laser. This diode laser will provide the narrow linewidth and wide tuning laser light we require.

NIST is seeking information from sources that may be capable of providing a commercial solution that will achieve the objectives described above, in addition to the following essential requirements: 

Specifically, the Contractor shall provide external cavity diode laser with a center wavelength near 1064 nm to serve as the seed laser for an optical parametric oscillator:

1. 1 A tuning range of at least 1040 nm to 1065 nm
2. Continuous, mode-hop free motored tuning over the entire tuning range
3. Laser linewidth <50 kHz at 5 μs
4. Output power in fiber of >15 mW between 1040 nm and 1065 nm
5. Optical isolation: >30 dB
6. Fast current modulation (AC and DC coupled)
7. Included fiber collimator
8. Attached fiber optic must be a PANDA PM fiber with narrow key FC/APC connectors with the slow axis aligned with the key
9. Integrated locking system with visual display, allowing top-of-fringe or side of fringe locking
10. Ability to tune laser and operate locking from front panel
11. Piezo step size of 5 kHz of less in optical frequency
12. USB or serial interface to PC
13. Continuous wave (CW) output
14. Mode hop free tuning range of at least 30 GHz

All needed electronic controllers must be included.

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